Production Ready 3D Optical Profiler
ZeGage Pro from Zygo
The ZeGage Pro and ZeGage Pro HR 3D optical profilers provide non-contact measurement and characterization of micro and nano-scale features of virtually any surface, and set the new standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers.
|Vibration-resistant, for metrology and process control on the production floor|
|ISO 25178-compliant results ensure confidence on your metrology|
|Non-contact, area-based metrology technique prevents part damage and is insensitive to part lay|
|Measurements require no consumables|
The base ZeGage Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples, with a much finer surface finish, the ZeGage Pro HR offers more than 20X higher precesion with 0.15 nm vertical precision.