Interferometer systems

Zygo's Verifire series of laser Fizeau interferometers represent a complete line of high performance metrology instruments for the measurement of plano, spherical and aspherical surfaces and material characteristics. The systems provide a variety of proprietary acquisition techniques to ensure optimum metrology in a wide range of environments.

The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

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ZYGO's Verifire HDX interferometer is designed and built for mid-spatial frequency content characterization of extreme performance optical components and systems.

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ZYGO's Verifire HD interferometer system provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront of optical systems and assemblies. The interferometric cavity length is precisely modulated while a high-speed camera captures several fringe images, which are analyzed by the software to create a highly detailed measurement of the part being tested.

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ZYGO's Verifire interferometer system provides fast high-precision measurements of plano or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Measure glass or plastic optical components - like flats, lenses, and prisms - and even precision machined metal and ceramic surfaces.

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The new Zygo DynaFiz dynamic laser interferometer is a highly optimized optical instrument designed specifically for performing accurate metrology of optics in the presence of air turbulence and extreme vibrations.

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Verifire XPZ - mechanical phase modulation, 640 x 480 pixel digital camera. Option 1k camera.

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Verifire QPZ - high speed digital camera, accurate phase acquisition includes acquisition capability for accurate metrology in the presence of large production vibrations. 1024 x1024 pixel camera at 100Hz.

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Verifire ATZ - highest performance interferometer with mechanical phase acquisition with a 1000 x 1000 pixel CCD camera. Ring of Fire illumination system, encoded zoom and focus capabilities.

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Verifire MST - wavelength shifting laser for simultaneous measurement of the front and back surface of transparent optics, thickness variation, wedge and 2-step homogeneity.The Verifire MST can measure two-, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, within the MetroPro software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.

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The Zygo Mini interferometer is a compact self-contained metrology system, designed to meet the unique requirements of production metrology. This advanced compact Fizeau interferometer features a proprietary method of phase-shifting acquisition that enables reliable metrology in production environments.

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