Zygo's Verifire series of laser Fizeau interferometers represent a complete line of high performance metrology instruments for the measurement of plano, spherical and aspherical surfaces and material characteristics. The systems provide a variety of proprietary acquisition techniques to ensure optimum metrology in a wide range of environments.
The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
ZYGO's Verifire HD interferometer system provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront of optical systems and assemblies. The interferometric cavity length is precisely modulated while a high-speed camera captures several fringe images, which are analyzed by the software to create a highly detailed measurement of the part being tested.
ZYGO's Verifire interferometer system provides fast high-precision measurements of plano or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Measure glass or plastic optical components - like flats, lenses, and prisms - and even precision machined metal and ceramic surfaces.
The new Zygo DynaFiz dynamic laser interferometer is a highly optimized optical instrument designed specifically for performing accurate metrology of optics in the presence of air turbulence and extreme vibrations.
Verifire QPZ - high speed digital camera, accurate phase acquisition includes acquisition capability for accurate metrology in the presence of large production vibrations. 1024 x1024 pixel camera at 100Hz.
Verifire MST - wavelength shifting laser for simultaneous measurement of the front and back surface of transparent optics, thickness variation, wedge and 2-step homogeneity.The Verifire MST can measure two-, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, within the MetroPro software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.
The Zygo Mini interferometer is a compact self-contained metrology system, designed to meet the unique requirements of production metrology. This advanced compact Fizeau interferometer features a proprietary method of phase-shifting acquisition that enables reliable metrology in production environments.