White light interferometer automated for production

NewView 7000 from Zygo

The NewView 7000 white light interferometer (profilometer) is a powerful tool for characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are nondestructive, fast, and require no sample preparation. Profile heights ranging from < 1 nm up to 20000 µm at high speeds, independent of surface texture, magnification, or feature height! Scanning white light interfermoeter, 150 mm XY stage, man. filter tray and aperture stop.

Features
Performs fully automated measurements with scripting under MP software
System for automotive customer
MEMS measurements
Thin film thickness measurement >400nm
2D VisionPro software interface

Using Zygo's coherence scanning interferometry (CSI) technology, the NewView 7300 3D optical surface profiler easily measures a wide range of surfaces, including smooth, rough, flat, sloped, and stepped surfaces.

Automatedflatness and roughness measurements

Fully automated white light interferometer for production floor to measure multiple tasks with one device. Because of automated objective change different lateral resolutions are possible with the same height resolution.

Step height parallelism and flatness

Fully automated white light interferometer for production floor to measure multiple tasks with one device. Because of automated objective change different lateral resolutions are possible with the same height resolution. This can for example be used to measure pump parts.

Thin transparent film

Non-contact CSI for instittues or labs to measure thin transparent films >1.5µm and substrate surface simultaneously

MEMs

Measuring dynamic MEMs with stroboscopic illumination. Used for cantilever at multiple resonance frequencies

VisionPro interface, vision inspection tool

Contacts

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Managing Director
+33 1 69194949
Fax: +33 1 69 19 49 30

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© LOT Quantum Design 2016