Optical surface profilers

Optical surface profilers from Zygo are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical surface profilers include proprietary data analysis and system control software. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.

Nexview 3D optical surface profiler excels at measuring all surfaces – from super-smooth to very rough, with sub-nanometer precision, independent of field of view.

Measurement types include flatness, roughness, large steps and segments, thin films, and steep slopes, with feature heights ranging from < 1 nm up to 20000 µm. With 200 mm XY stage and mot. filter tray zoom tubes and aperture stop.

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Zygo ZeGage vibration-resistant white light interferometer, for machined surface metrology and process control on the production floor. ISO 25178-compliant texture results ensure correlation to stylus metrology.

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The NewView 7000 white light interferometer (profilometer) is a powerful tool for characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are nondestructive, fast, and require no sample preparation. Profile heights ranging from < 1 nm up to 20000 µm at high speeds, independent of surface texture, magnification, or feature height! Scanning white light interfermoeter, 150 mm XY stage, man. filter tray and aperture stop.

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The NewView 8000 series of 3D optical surface profilers provide powerful versatility in non-contact optical surface profiling. All measurements are non-destructive, fast, and require no sample preparation. Advanced software tools characterize and quantify surface roughness, step heights, critical dimensions, and other topographical features, with excellent precision and accuracy. Integrated motorized zoom for NV8300.

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